brief procedure
about operation of vacuum pumping system. The step by
step procedure will ensure the proper functioning of the pump. This
procedure is developed based on the reviews
and experience of technicians of vacuum pump.
1. Switch ON mains
2. Switch ON Rotary Pump (RP)
3. Make sure Combination Valve
(CV) is in CLOSE position and allow the pump to develop vacuum of 0.05 mbar. (pumping circuit
is 1-2-3, see the figure)
4. Position CV to backing
position (GH1/PR1) and allow the pump to develop vacuum of 0.05 mbar. (pumping circuit
is 1-2-5)
5. Position CV to Roughing
Position (GH2/PR2) and allow the pump to develop vacuum of 0.05 mbar. (pumping circuit
is 1-2-3-4)
6. Now to develop high vacuum,
First position the CV to close and immediate to backing position.
7. Now switch on the turbo pump.
8. Once the speed is achieved,
Position the CV to roughing position (GH2/PR2) and allow the pump to develop
vacuum of 0.05 mbar.
9. Again put CV to closing
position and immediately keep in backing position (GH1/PR1)
10. Now open the high vacuum valve (Gate Valve)
(pumping circuit is 1-2-5-3-4)
11. After 5 min, switch ON
penning gauge to show the reading. Always keep in mind not to keep it in ON
condition throughout running. But switch it on when it is required to
take reading otherwise keep it OFF.
In Old Vacuum system with turbo
pump (VS-114DT), company-HindHigh vacuum
system), roughing will requires gauge in GH2 and backing requires gauge in GH1
condition while new vacuum system will not requires these.
Old vacuum system with turbo pump
(VS-114DT) requires setting gauge position to GH1 & GH2 while new vacuum
system with turbo pump (VS-114T) will not require to do so.
Always operate CV and high vacuum
valve gradually
Always put high vacuum valve in
CLOSE position while doing Roughing.
Always keep in mind to have
backing Position (GH1/PR1) while using turbo Pump
In case of power failure during
running condition, immediately shut/close all the parts of system like gauges,
CV, and high vacuum valve.
In case power takes very little
time (2 min or less) to come back, there is no need to do Roughing again, and
if takes long more than 30 min, it is mandatory to do Roughing again. And do
the same procedure again which otherwise required for starting pump.
Foreline Trap: If sufficient vacuum is not obtained at
any time, CLOSE the CV valve and allow to having vacuum of 0.05 mbar. Open GAS
BALLAST plug from ROTARY PUMP and then switch ON the foreline Trap Heater for
30 minutes to dry out oil/moisture trapped in rotary pump.
1. Switch
OFF penning gauge
2. Close
high vacuum valve (gate valve)
3. Switch
OFF turbo Pump
4. Wait
for 10 min.
5. Close
CV valve and then
6. Switch
off rotary valve