Capacitance-type accelerometers

ROHM Group accelerometers are capacitive types developed using MEMS technology.
The sensor element consists of a fixed electrode comprised of Si, a working electrode, and spring. In a state with no acceleration, the distance between the fixed and movable electrode is the same. When acceleration is applied, the movable electrode is displaced. This causes a change in the positional relationship with the fixed electrode, changing the capacitance between the electrodes. The capacitance change is converted to voltage by an ASIC* and used to calculate acceleration.