Magnetostrictive Torsion Transducer
Hall-Effect Transducers
IC SENSOR
Although conventional sensors are commercially still very much in use, over' the last three decades, the use ofsolidstate sensors also have been increased. In this category,the semiconductor micro and .nano-sensors, ceramic and chemical sensors using new materials and technologies .such as Ie technology, VIJSIchips, arid micromachining techniques are Included. .For' ~semiconductormicro:,sensors, the IC ,technology comprisng of photo lithographic etching,deposition, metallization, and assembling is essential and this is .the basis for thick and thin 'film, chemical and electrochemical, and biologieal.sensors. IC elements a renow extensively used in the measurement of temperature, flow. and magnetic field.
Film Sensors
Thick Film Sensors